1.物理、化学、生物和新材料等领域所涉及的微/纳结构及器件的加工
2.针对不同材料的新型加工工艺的研究
3.基于新型微纳系统的交叉研究
4.纳系统的集成技术和工艺研究
5.针对企业和科研单位的小批量加工服务
2. Development of new processes in various materials
3. Multidisciplinary research on new micro- and nano- systems
4. Integration techniques of micro- and nano- systems
5. Fabrication of small batch of products for industry and research institutions